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Synthesis of Titanium Oxide thin films by High Power Impulse Magnetron Sputtering (HiPIMS): Study of the transition between metallic and oxidized regimes and the film phase constitution
Balhamri, Adil; Konstantinidis, Stéphanos; Snyders, Rony
2010 • HTPP 11 - High-Tech Plasma Processes
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https://hdl.handle.net/20.500.12907/39943
 

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Disciplines :
Chemistry
Physics
Author, co-author :
Balhamri, Adil ;  Université de Mons > Faculté des Sciences > Chimie des Interactions Plasma-Surface
Konstantinidis, Stéphanos  ;  Université de Mons > Faculté des Sciences > Chimie des Interactions Plasma-Surface
Snyders, Rony  ;  Université de Mons > Faculté des Sciences > Chimie des Interactions Plasma-Surface
Language :
English
Title :
Synthesis of Titanium Oxide thin films by High Power Impulse Magnetron Sputtering (HiPIMS): Study of the transition between metallic and oxidized regimes and the film phase constitution
Publication date :
27 June 2010
Number of pages :
1
Event name :
HTPP 11 - High-Tech Plasma Processes
Event place :
Bruxelles, Belgium
Event date :
2010
Research unit :
S882 - Chimie des Interactions Plasma-Surface
Research institute :
R400 - Institut de Recherche en Science et Ingénierie des Matériaux
Available on ORBi UMONS :
since 01 February 2011

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