[en] The advent of near-infrared femtosecond pulse laser has enabled the highly-resolved manufacturing of micro/nano structures in various materials including glass. In this paper, we make use of an automated femtosecond laser system, so-called Femtoprint, to design a monolithic self-instrumented mechanism that we use for in-built strain sensing. To that aim, a flexible structure is designed and produced from a silica planar substrate. It has a flexural joint in which an optical waveguide and a Bragg grating have been directly inscribed using femtosecond pulse laser. The latter provides a non-destructive and non-intrusive measurement tool. The axial strain sensitivity of the in-built Bragg grating has been experimentally determined to be 1.22 pm/μ ϵ, while its temperature sensitivity is 10.51 pm/°C. The demonstration of such instrumented glass flexible mechanisms paves the way towards a new class of highly integrated sensors suitable for applications at the microscale or in harsh environments.
Disciplines :
Physical, chemical, mathematical & earth Sciences: Multidisciplinary, general & others
Author, co-author :
Tunon de lara, Mateo ✱; Université de Mons - UMONS > Recherche > Service ERC Unit - Advanced Photonic
Amez-Droz, Loïc ✱; Université Libre de Bruxelles ; Department of Aerospace and Mechanical Engineering
Chah, Karima ; Université de Mons - UMONS > Recherche > Service ERC Unit - Advanced Photonic
Lambert, Pierre ; Université de Mons - UMONS > Unités externes > FPMS - Intervenants extérieurs à Charleroi ; Université Libre de Bruxelles
Collette, Christophe; Department of Aerospace and Mechanical Engineering ; Université Libre de Bruxelles
Caucheteur, Christophe ; Université de Mons - UMONS > Faculté Polytechnique > Service d'Electromagnétisme et Télécommunications
✱ These authors have contributed equally to this work.
Language :
English
Title :
Femtosecond pulse laser-engineered glass flexible structures instrumented with an in-built Bragg grating sensor.