A Corrugated Diaphragm-Based Fabry-Perot Ultrasonic Sensor by Two-Photon 3D Printing

corrugated diaphragm; Fabry-Perot interferometer; optical fiber sensors; ultrasound detection; 3-D printing; 3D-printing; Corrugated diaphragm; Fabry-Perot; Fiber-optics; Fibre tip; Sensitivity; Two photon; Ultrasound detection; Writing; Electronic, Optical and Magnetic Materials; Atomic and Molecular Physics, and Optics; Electrical and Electronic Engineering

Abstract :

[en] A polymer corrugated diaphragm-based fiber-optic Fabry-Perot (FP) interferometer is proposed as an ultrasonic sensor and directly fabricated on an optical fiber tip by direct laser writing via two-photon polymerization. The structure of the corrugated diaphragm is optimized, and the mechanical properties are investigated numerically. The experimental results show that the proposed device has a resonant frequency of 150 kHz and an enhanced mechanical sensitivity of 367.73nm/kPa@100 kHz, and a low noise equivalent level of 1.92 mPa/Hz1/2@100 kHz. The sensitivity is much higher that of FP devices with uniform diaphragm, demonstrating that the designed sensor is capable of detecting weak ultrasonic waves.

Disciplines :

Electrical & electronics engineering

Author, co-author :

Wei, Yan ; Shanghai University, Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Joint International Research Laboratory of Specialty Fiber Optics and Advanced Communication, Shanghai, China

Sun, Kexuan; Shanghai University, Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Joint International Research Laboratory of Specialty Fiber Optics and Advanced Communication, Shanghai, China

Wei, Heming ; Shanghai University, Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Joint International Research Laboratory of Specialty Fiber Optics and Advanced Communication, Shanghai, China

Zhu, Mengshi ; Shanghai University, Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Joint International Research Laboratory of Specialty Fiber Optics and Advanced Communication, Shanghai, China

Pang, Fufei ; Shanghai University, Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Joint International Research Laboratory of Specialty Fiber Optics and Advanced Communication, Shanghai, China

Marques, Carlos ; University of Aveiro, Department of Physics, Aveiro, Portugal

Hu, Xuehao ; Université de Mons - UMONS > Recherche > Service ERC Unit - Advanced Photonic

Language :

English

Title :

A Corrugated Diaphragm-Based Fabry-Perot Ultrasonic Sensor by Two-Photon 3D Printing

Publication date :

15 October 2023

Journal title :

IEEE Photonics Technology Letters

ISSN :

1041-1135

eISSN :

1941-0174

Publisher :

Institute of Electrical and Electronics Engineers Inc.

Volume :

Issue :

Pages :

1078 - 1081

Peer reviewed :

Peer Reviewed verified by ORBi

Additional URL :

http://xplorestaging.ieee.org/ielx7/68/10214412/10190749.pdf?arnumber=10190749

Research unit :

Electromagnetism and Telecommunications

Research institute :

Research Institute for Materials Science and Engineering

Funders :

National Natural Science Foundation of China
Natural Science Foundation of Shanghai, China
Postdoctoral Researcher Grant (Chargé de Recherches) from Fonds de la Recherche Scientifique

Funding text :

This work was supported in part by the National Natural Science Foundation of China under Grant 62005153; and in part by the Natural Science Foundation of Shanghai, China, under Grant 20ZR1420300. The work of Xuehao Hu was supported by the Postdoctoral Researcher Grant (Chargé de Recherches) from Fonds de la Recherche Scientifique (F.R.S.-FNRS).

Available on ORBi UMONS :

since 17 January 2024

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