Fabry-Perot microcavity; Non-contact optical sensing; Pressure sensor; Two-photon 3D printing; 3-D printing; 3D-printing; Contact pressures; Fabry-Perot microcavities; Non-contact; Optical sensing; Optical-; Two photon; Two-photon 3d printing; Electronic, Optical and Magnetic Materials; Atomic and Molecular Physics, and Optics; Electrical and Electronic Engineering
Abstract :
[en] In this work, a polymer Fabry-Perot interferometer-based microcavity via two-photon direct laser writing is proposed, designed, and experimentally demonstrated as an optical pressure sensor. The sensor comprises a film-based hollow cavity with a diameter of 350 μm and an annular flow channel with four drain holes, which is further sealed for pressure sensing. As the applied pressure varies, the cavity length changes accordingly. Here, a non-contact optical spectral demodulation system integrated with an optical microscopy was designed. An illuminated light was used for localizing the device and a broadband near-infrared light was coupled into an objective lens and the transmitted light was reflected by the device and detected by a spectral demodulation system. To demodulate the spectral signal, a Fourier demodulation algorithm was used to track the wavelength. The results showed that the sensor exhibited a high sensitivity of 398 pm/kPa and good stability. This work can be used for non-contact pressure detection in the critical field of biomedical and aerospace applications.
Disciplines :
Materials science & engineering
Author, co-author :
Wei, Heming ; Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Joint International Research Laboratory of Specialty Fiber Optics and Advanced Communication, Shanghai University, Shanghai, China
Hou, Linsong; Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Joint International Research Laboratory of Specialty Fiber Optics and Advanced Communication, Shanghai University, Shanghai, China
Wei, Yan; Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Joint International Research Laboratory of Specialty Fiber Optics and Advanced Communication, Shanghai University, Shanghai, China
Ding, Wucheng; Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Joint International Research Laboratory of Specialty Fiber Optics and Advanced Communication, Shanghai University, Shanghai, China
He, Guoqiang; Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Joint International Research Laboratory of Specialty Fiber Optics and Advanced Communication, Shanghai University, Shanghai, China
Yin, Ruixue; Shanghai Key Laboratory of Intelligent Sensing and Detection, East China University of Science and Technology, Shanghai, China
Ren, Dongni; Mingche Biotechnology (Suzhou) Co., Ltd., Suzhou, China
Pang, Fufei; Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Joint International Research Laboratory of Specialty Fiber Optics and Advanced Communication, Shanghai University, Shanghai, China
Caucheteur, Christophe ; Université de Mons - UMONS > Faculté Polytechnique > Service d'Electromagnétisme et Télécommunications
Hu, Xuehao ; Université de Mons - UMONS > Recherche > Service ERC Unit - Advanced Photonic
Marques, Carlos ; CICECO – Aveiro Institute of Materials, Physics Department, University of Aveiro, Aveiro, Portugal
Language :
English
Title :
Two-photon 3D printing optical Fabry-Perot microcavity for non-contact pressure detection
Research Institute for Materials Science and Engineering
Funding text :
H. Wei acknowledges the supports by the National Natural Science Foundation of China under Grant 62005153 and in part by the Natural Science Foundation of Shanghai, China, under Grant 20ZR1420300. The Fonds de la Recherche Scientifique (F.R.S.-FNRS) under the Postdoctoral Researcher grant (Charg\u00E9 de Recherches) of Xuehao Hu and the Senior Research Associate Position of Christophe Caucheteur. This work was also developed within the scope of the projects CICECO (LA/P/0006/2020, UIDB/50011/2020 & UIDP/50011/2020) and DigiAqua (PTDC/EEI-EEE/0415/2021), financed by national funds through the (Portuguese Science and Technology Foundation/MCTES (FCT I.P.)).
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