Tuning the crystallinity of TiO2 coatings synthesized by an atmospheric pressure dielectric barrier discharge in a single step process _ Journal of Vacuum Science & Technology A _ AIP Publishing.pdf
[en] Titanium dioxide in its anatase form is of significant interest nowadays due to numerous properties such as biocompatibility, photoactivity under ultraviolet irradiation, or corrosion resistance. In this paper, titanium dioxide (TiO2) films are synthesized with a controlled substrate temperature going up to 673 K. Crystalline anatase was synthesized in a low power atmospheric pressure dielectric barrier discharge in a single step process. The effect of deposition parameters (plasma gas, the voltage input, precursor flow, deposition time, and substrate temperature) on the crystal size, crystallinity, and coating morphology was studied. It shows that the crystal size can be tuned, that the layers can have a transition from hydrophilicity to hydrophobicity, and that the coating morphology can be modified by optimizing these parameters. Finally, it is found that crystalline anatase TiO2 can be grown at a substrate temperature as low as 523 K in an atmospheric pressure plasma enhanced chemical vapor deposition process.
Disciplines :
Chemistry
Author, co-author :
Fosseur, Nicolas ; Chemistry of Surfaces, Interfaces and Nanomaterials (ChemSIN), Faculty of Sciences, Université libre de Bruxelles 1 , Ixelles, 1050, ; 4MAT, Engineering Faculty, Université libre de Bruxelles 2 , Ixelles, 1050,
Fontaine, Thomas ; Université de Mons - UMONS > Faculté des Sciences > Service de Chimie des Interactions Plasma-Surface ; Chemistry of Surfaces, Interfaces and Nanomaterials (ChemSIN), Faculty of Sciences, Université libre de Bruxelles 1 , Ixelles, 1050,
Petitjean, David ; Chemistry of Surfaces, Interfaces and Nanomaterials (ChemSIN), Faculty of Sciences, Université libre de Bruxelles 1 , Ixelles, 1050,
SNYDERS, Rony ; Université de Mons - UMONS > Faculté des Sciences > Service de Chimie des Interactions Plasma-Surface ; Materia Nova R&D Center 4 , Mons 7000,
Reniers, François ; Chemistry of Surfaces, Interfaces and Nanomaterials (ChemSIN), Faculty of Sciences, Université libre de Bruxelles 1 , Ixelles, 1050,
Language :
English
Title :
Tuning the crystallinity of TiO2 coatings synthesized by an atmospheric pressure dielectric barrier discharge in a single step process
Publication date :
17 June 2025
Journal title :
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces, and Films
R400 - Institut de Recherche en Science et Ingénierie des Matériaux
Funders :
FRIA - Fonds pour la Formation à la Recherche dans l'Industrie et dans l'Agriculture Fondation Jaumotte-Demoulin F.R.S.-FNRS - Fonds de la Recherche Scientifique
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