[en] The optical properties of thins NCrOx layer were investigated by spectroscopic ellipsometry (SE). The layers were coated on float glass by magnetron sputtering at different oxygen partial pressures (20% to 30% oxygen in the sputtering gas) and the influence of the degree of oxidation was considered in details. The optical constants of the films n and k, in the visible to near infrared spectral range (0.35 to 1.7 µm), appear to be extremely sensitive to their chemical composition. Complementary studies were carried out using Fourier transform infrared ellipsometry (FTIR-SE) to determine the optical conductivity of the films and compare it with four-points-probe measurements
Disciplines :
Chemistry Physics
Author, co-author :
Dahmouchène, N.
Voué, Michel ; Université de Mons > Faculté des Sciences > Laboratoire de Physique des Surfaces et Interfaces
Stehlé, J.L.
Defranoux, C.
Nouvellon, C.
De Coninck, Joël ; Université de Mons > Faculté des Sciences > Service du Laboratoire de Physique des Surfaces et Interfaces
Language :
English
Title :
Optical properties of NiCrOx thin films
Publication date :
01 May 2008
Journal title :
Physica Status Solidi C. Current Topics in Solid State Physics
ISSN :
1862-6351
Publisher :
Wiley - VCH Verlag GmbH & Co., Germany
Volume :
5
Pages :
1145-1149
Peer reviewed :
Peer Reviewed verified by ORBi
Research unit :
S877 - Laboratoire de Physique des Surfaces et Interfaces S878 - Physique des matériaux et Optique
