Plasma diagnostics for understanding the plasma-surface interaction in HiPIMS discharges: a review

Britun, Nikolay; Minea, Tiberiu; Konstantinidis, Stéphanos; Snyders, Rony

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Plasma diagnostics for understanding the plasma-surface interaction in HiPIMS discharges: a review

Britun, Nikolay; Minea, Tiberiu; Konstantinidis, Stéphanos et al.

2014 • In Journal of Physics: D Applied Physics, 47, p. 224001

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Abstract :

[en] The physical and chemical aspects of plasma-surface interaction in high-power impulse magnetron sputtering (HiPIMS) discharges are overviewed. The data obtained by various plasma diagnostic methods representing the important sputtering discharge regions, namely the cathode vicinity, plasma bulk, and substrate vicinity, are reported. After a detailed introduction to the problem and description of the plasma characterization methods suitable for pulsed magnetron discharge analysis, an overview of the recent plasma diagnostics achievements in both non-reactive and reactive HiPIMS discharges is presented. Finally, the conclusions and perspectives suggesting possible directions and research strategies for increasing our knowledge in this domain are given.

Disciplines :

Architecture
Physics

Author, co-author :

Britun, Nikolay ; Université de Mons > Faculté des Sciences > Chimie des Interactions Plasma-Surface

Minea, Tiberiu

Konstantinidis, Stéphanos ; Université de Mons > Faculté des Sciences > Service de Chimie des Interactions Plasma-Surface

Snyders, Rony ; Université de Mons > Faculté des Sciences > Chimie des Interactions Plasma-Surface

Language :

English

Title :

Plasma diagnostics for understanding the plasma-surface interaction in HiPIMS discharges: a review

Publication date :

14 May 2014

Journal title :

Journal of Physics: D Applied Physics

ISSN :

0022-3727

Publisher :

Institute of Physics Publishing, Bristol, United Kingdom

Volume :

Pages :

224001

Peer reviewed :

Peer Reviewed verified by ORBi

Research unit :

S882 - Chimie des Interactions Plasma-Surface

Research institute :

R400 - Institut de Recherche en Science et Ingénierie des Matériaux

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109

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