Ground state atomic oxygen in high-power impulse magnetron sputtering: a quantitative study

Britun, Nikolay; Belosludtsev, Alexandr; Da Ponte Silva, Tiago; Snyders, Rony

doi:10.1088/1361-6463/aa560c

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Ground state atomic oxygen in high-power impulse magnetron sputtering: a quantitative study

Britun, Nikolay; Belosludtsev, Alexandr; Da Ponte Silva, Tiago et al.

2017 • In Journal of Physics: D Applied Physics, 50 (7), p. 075204

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https://hdl.handle.net/20.500.12907/16238

DOI
10.1088/1361-6463/aa560c

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Research center :

CIRMAP - Centre d'Innovation et de Recherche en Matériaux Polymères

Disciplines :

Architecture
Physics
Chemistry

Author, co-author :

Britun, Nikolay ; Université de Mons > Faculté des Sciences > Chimie des Interactions Plasma-Surface

Belosludtsev, Alexandr

Da Ponte Silva, Tiago

Snyders, Rony ; Université de Mons > Faculté des Sciences > Chimie des Interactions Plasma-Surface

Language :

English

Title :

Ground state atomic oxygen in high-power impulse magnetron sputtering: a quantitative study

Publication date :

2017

Journal title :

Journal of Physics: D Applied Physics

ISSN :

0022-3727

eISSN :

1361-6463

Publisher :

Institute of Physics Publishing, Bristol, United Kingdom

Volume :

Issue :

Pages :

075204

Peer reviewed :

Peer Reviewed verified by ORBi

Research unit :

S882 - Chimie des Interactions Plasma-Surface

Research institute :

R400 - Institut de Recherche en Science et Ingénierie des Matériaux

Available on ORBi UMONS :

since 23 January 2017

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Bibliography

Gill W D and Kay E 1965 Rev. Sci. Instrum. 36 277
Chapin J S 1974 Res. Dev. 25 37
Bräuer G, Szyszka B, Vergöhl M and Bandorf R 2010 Vacuum 84 1354
Musil J, Baroch P, Vlček J, Nam K H and Han J G 2005 Thin Solid Films 475 208
Kelly P J and Bradley J W 2009 J. Optoelectron. Adv. Mater. 11 1101
Mozgrin D V, Fetisov I K and Khodachenko G V 1995 Plasma Phys. Rep. 21 400
Fetisov I K, Filippov A A, Khodachenko G V, Mozgrin D V and Pisarev A A 1999 Vacuum 53 133
Helmersson U, Lattemann M, Bohlmark J, Ehiasarian A P and Gudmundsson J T 2006 Thin Solid Films 513 1
Gudmundsson J T, Brenning N, Lundin D and Helmersson U 2012 J. Vac. Sci. Technol. A 30 030801
Britun N, Minea T, Konstantinidis S and Snyders R 2014 J. Phys. D: Appl. Phys. 47 224001
Sarakinos K, Alami J and Konstantinidis S 2010 Surf. Coat. Technol. 204 1661
Audronis M and Bellido-Gonzalez V 2010 Thin Solid Films 518 1962
Hala M, Viau N, Zabeida O, Klemberg-Sapieha J E and Martinu L 2010 J. Appl. Phys. 107 043305
Palmucci M, Britun N, Silva T, Snyders R and Konstantinidis S 2013 J. Phys. D: Appl. Phys. 46 215201
Britun N, Han J G and Oh S-G 2008 Appl. Phys. Lett. 92 141503
Britun N, Han J G and Oh S-G 2008 Plasma Sources Sci. Technol. 17 045013
Britun N, Palmucci M, Konstantinidis S and Snyders R 2015 J. Appl. Phys. 117 163302
Godfroid T, Dauchot J P and Hecq M 2003 Surf. Coat. Technol. 174-5 1276
Vitelaru C, Lundin D, Brenning N and Minea T 2013 Appl. Phys. Lett. 103 104105
Mitchell A C and Zemansky M W 1971 Resonance Radiation and Excited Atoms (New York: Plenum)
Nagai H, Hiramatsu M, Hori M and Goto T 2003 Rev. Sci. Instrum. 74 3453
Niemi K, Der Gathen V S and Döbele H F 2001 J. Phys. D: Appl. Phys. 34 2330
Palmucci M, Britun N, Konstantinidis S and Snyders R 2013 J. Appl. Phys. 114 113302
Aiempanakit M, Aijaz A, Lundin D, Helmersson U and Kubart T 2013 J. Appl. Phys. 113 133302
Niemi K, Der Gathen V S and Döbele H F 2005 Plasma Sources Sci. Technol. 14 375
Ochkin V N 2009 Spectroscopy of Low Temperature Plasma (Weinheim: Wiley-VCH)
Silva T, Britun N, Godfroid T and Snyders R 2014 Plasma Sources Sci. Technol. 23 025009
Zhu X-M and Pu Y-K 2010 J. Phys. D: Appl. Phys. 43 403001
Fantz U 2006 Plasma Sources Sci. Technol. 15 S137
Boffard J B, Jung R O, Lin C C and Wendt A E 2010 Plasma Sources Sci. Technol. 19 065001
Biagi Database 2016 www.lxcat.net, Retrieved 29 July 2016
IST-Lisbon Database 2016 www.lxcat.net, Retrieved 29 July 2016
Silva T, Britun N, Godfroid T, van der Mullen J and Snyders R 2016 J. Appl. Phys. 119 173302
Pajdarová A, Vlček J, Kudláček P and Lukáš J 2009 Plasma Sources Sci. Technol. 18 025008
Poolcharuansin P and Bradley J W 2010 Plasma Sources Sci. Technol. 19 025010
Britun N, Palmucci M, Konstantinidis S, Gaillard M and Snyders R 2013 J. Appl. Phys. 114 013301
Britun N, Palmucci M, Konstantinidis S and Snyders R 2015 J. Appl. Phys. 117 163303
Britun N, Konstantinidis S and Snyders R 2015 Plasma Process. Polym. 12 1010
Vitelaru C, Lundin D, Stancu G D, Brenning N, Bretagne J and Minea T 2012 Plasma Sources Sci. Technol. 21 025010
Britun N, Michiels M and Snyders R 2015 Rev. Sci. Instrum. 86 123114
De Poucques L, Imbert J-C, Boisse-Laporte C, Bretagne J, Ganciu M, Teulé-Gay L and Touzeau M 2006 Plasma Sources Sci. Technol. 15 661
Nee J B, Yuan C Y, Hsu J, Chen W J and Yang J C 2005 Chem. Phys. 315 81
Marinelli W J, Kessler W J, Green B D and Blumberg W A M 1989 J. Chem. Phys. 90 2167
Roth E-P, Perner D and Dreyer J W 1973 Z. Naturforsch. 28a 725
Piper L G, Velazco J E and Setser D W 1973 J. Chem. Phys. 59 3323
Payling R and Larkins P 2000 Optical Emission Lines of the Elements (CD-ROM) (New York: Wiley)
Sato M 1989 J. Phys. D: Appl. Phys. 22 1929
Gudmundsson J T, Lundin D, Brenning N, Raadu M A, Huo C and Minea T M 2016 Plasma Sources Sci. Technol. 25 065004
Depla D, Heirwegh S, Mahieu S, Haemers J and De Gryse R 2007 J. Appl. Phys. 101 013301
Kubart T, Polcar T, Kappertz O, Parreira N, Nyberg T, Berg S and Cavaleiro A 2007 Plasma Process. Polym. 4 S522
Tabata S and Iwata M 1963 Vacuum 13 413
Liljeholm L 2012 Reactive sputter deposition of functional thin films PhD Thesis Uppsala University
Li D, Nikiforov A, Britun N, Snyders R, Kong M G and Leys C 2016 J. Phys. D: Appl. Phys. 49 45
Laher R R and Gilmore F R 1990 J. Phys. Chem. Ref. Data 19 277
Britun N, Konstantinidis S and Snyders R 2014 Int. Conf. Reactive Sputtering Deposition (Ghent)