Ground state atomic oxygen in high-power impulse magnetron sputtering: a quantitative study

Britun, Nikolay; Belosludtsev, Alexandr; Da Ponte Silva, Tiago; Snyders, Rony

doi:10.1088/1361-6463/aa560c

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Ground state atomic oxygen in high-power impulse magnetron sputtering: a quantitative study

Britun, Nikolay; Belosludtsev, Alexandr; Da Ponte Silva, Tiago et al.

2017 • In Journal of Physics: D Applied Physics, 50 (7), p. 075204

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https://hdl.handle.net/20.500.12907/16238

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10.1088/1361-6463/aa560c

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Research center :

CIRMAP - Centre d'Innovation et de Recherche en Matériaux Polymères

Disciplines :

Architecture
Physics
Chemistry

Author, co-author :

Britun, Nikolay ; Université de Mons > Faculté des Sciences > Chimie des Interactions Plasma-Surface

Belosludtsev, Alexandr

Da Ponte Silva, Tiago

Snyders, Rony ; Université de Mons > Faculté des Sciences > Chimie des Interactions Plasma-Surface

Language :

English

Title :

Ground state atomic oxygen in high-power impulse magnetron sputtering: a quantitative study

Publication date :

2017

Journal title :

Journal of Physics: D Applied Physics

ISSN :

0022-3727

eISSN :

1361-6463

Publisher :

Institute of Physics Publishing, Bristol, United Kingdom

Volume :

Issue :

Pages :

075204

Peer reviewed :

Peer Reviewed verified by ORBi

Research unit :

S882 - Chimie des Interactions Plasma-Surface

Research institute :

R400 - Institut de Recherche en Science et Ingénierie des Matériaux

Available on ORBi UMONS :

since 23 January 2017

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