D. V. Mozgrin, I. K. Fetisov, and G. V. Khodachenko, Plasma Phys. Rep. 21, 400 (1995).
I. K. Fetisov, A. A. Filippov, G. V. Khodachenko, D. V. Mozgrin, and A. A. Pisarev, Vacuum 53, 133 (1999). 10.1016/S0042-207X(98)00408-4
K. Macák, V. Kouznetsov, J. Schneider, U. Helmersson, and I. Petrov, J. Vac. Sci. Technol. A 18 (4), 1533 (2000). 10.1116/1.582380
A. Anders, Surf. Coat. Technol. 204, 2864 (2010). 10.1016/j.surfcoat. 2010.01.047
K. Sarakinos, J. Alami, and S. Konstantinidis, Surf. Coat. Technol. 204, 1661 (2010). 10.1016/j.surfcoat.2009.11.013
A. C. G. Mitchell and M. W. Zemansky, Resonance Radiation and Excited Atoms (Cambridge University Press, Cambridge, 1971), pp. 103, 121.
N. Britun, M. Palmucci, S. Konstantinidis, and R. Snyders, in Proceedings of the 11-th International Symposium for Sputtering and Plasma Processes (ISSP) (Osamu Nakagawara, Kyoto, 2011), p. 198.
M. Gaillard, N. Britun, Y. M. Kim, and J. G. Han, J. Phys. D: Appl. Phys. 40, 809 (2007). 10.1088/0022-3727/40/3/018
N. Britun, M. Gaillard, L. Schwaederlé, Y. M. Kim, and J. G. Han, Plasma Sources Sci. Technol. 15, 790 (2006). 10.1088/0963-0252/15/4/024
N. Britun, S. Ershov, A.-A. El Mel, S. Konstantinidis, A. Ricard, and R. Snyders, J. Phys. D: Appl. Phys. 46, 175202 (2013). 10.1088/0022-3727/46/17/ 175202
N. Britun, J. G. Han, and S.-G. Oh, Appl. Phys. Lett. 92, 141503 (2008). 10.1063/1.2907505
C. Vitelaru, L. de Poucques, T. M. Minea, and G. Popa, J. Appl. Phys. 109, 053307 (2011). 10.1063/1.3553395
L. de Poucques, C. Vitelaru, T. M. Minea, J. Bretagne, and G. Popa, Europhys. Lett. 82, 15002 (2008). 10.1209/0295-5075/82/15002
N. Britun, J. G. Han, and S. G. Oh, Plasma Sources Sci. Technol. 17, 045013 (2008). 10.1088/0963-0252/17/4/045013
N. Britun, M. Palmucci, and R. Snyders, Appl. Phys. Lett. 99, 131504 (2011). 10.1063/1.3644989
A. Fridman and L. Kennedy, Plasma Physics and Engineering (Taylor Francis, New York, 2004), pp. 134-135.
V. Linss, H. Kupfer, S. Peter, and F. Richter, J. Phys. D: Appl. Phys. 37, 1935 (2004). 10.1088/0022-3727/37/14/008
A. Ricard, C. Nouvellon, S. Konstantinidis, J. P. Dauchot, M. Wautelet, and M. Hecq, J. Vac. Sci. Technol. A. 20 (4), 1488 (2002). 10.1116/1.1488948
N. Britun, M. Gaillard, S. G. Oh, and J. G. Han, J. Phys. D: Appl. Phys. 40, 5098 (2007). 10.1088/0022-3727/40/17/015
V. Linss, H. Kupfer, S. Peter, and F. Richter, Surf. Coat. Technol. 200, 1696 (2005). 10.1016/j.surfcoat.2005.08.035
G. Herzberg, Molecular Spectra and Molecular Structure. Vol. 1: Spectra of Diatomic Molecules, 2nd ed. (D. van Nostrand Co., Princeton, 1950), pp. 107, 127.
M. Gaillard, " Simulation of rotational bands belonging to the First Negative System of the nitrogen ionized molecule. " (unpublished).
Where the magnetic field lines are mainly concentrated near the magnetron target and the electrons are trapped in the spherical segment adjacent to it. In the so called unbalanced magnetrons such an electron trapping is less pronounced.
S. Berg and T. Nyberg, Thin Solid Films 476, 215 (2005). 10.1016/j.tsf.2004.10.051
The correction is performed using the Wolfram mathematica 8.0 computational software.
Y. Yamamura and H. Tawara, At. Data Nucl. Data Tables 62, 149 (1996). 10.1006/adnd.1996.0005
S. Konstantinidis, A. Ricard, R. Snyders, H. Vandeparre, J. P. Dauchot, and M. Hecq, Surf. Coat. Technol. 200, 841 (2005). 10.1016/j.surfcoat.2005.02. 192
D. V. Sivuhin, A General Course of Physics. Vol. 2: Molecular Physics (Nauka, Moscow, 1988), p. 331 [In Russian].
N. Britun, M. Gaillard, A. Ricard, Y. M. Kim, K. S. Kim, and J. Han, J. Phys. D: Appl. Phys. 40, 1022 (2007). 10.1088/0022-3727/40/4/016
N. Britun, T. Godfroid, S. Konstantinidis, and R. Snyders, Appl. Phys. Lett. 98, 141502 (2011). 10.1063/1.3576928
C. Vitelaru, D. Lundin, G. D. Stancu, N. Brenning, J. Bretagne, and T. Minea, Plasma Sources Sci. Technol. 21, 025010 (2012). 10.1088/0963-0252/21/2/ 025010
C. A. Brau and R. M. Jonkman, J. Chem. Phys. 52, 477 (1970). 10.1063/1.1673010
J. T. Gudmundsson, N. Brenning, D. Lundin, and U. Helmersson, J. Vac. Sci. Technol. A 30, 030801 (2012). 10.1116/1.3691832
J. Amorim, G. Baravian, and J. Jolly, J. Phys. D: Appl. Phys. 33, R51 (2000). 10.1088/0022-3727/33/9/201
N. Britun, M. Gaillard, and J. G. Han, J. Phys. D: Appl. Phys. 41, 185201 (2008). 10.1088/0022-3727/41/18/185201
M. Palmucci, N. Britun, S. Konstantinidis, and R. Snyders, "Rarefaction windows in a high-power impulse magnetron sputtering plasma," J. Appl. Phys. (to be pubslihed).
According to Sirah Cobra Stretch dye laser linewidth specifications (http://www.sirah.com/laser/pulsed-dye-lasers/cobra-stretch).
T. Kubart, M. Aiempanakit, J. Andersson, T. Nyberg, S. Berg, and U. Helmersson, Surf. Coat. Technol. 205, S303 (2011). 10.1016/j.surfcoat.2011.01. 019
D. Horwat and A. Anders, J. Appl. Phys. 108, 123306 (2010). 10.1063/1.3525986
