Sputtered titanium species dynamics in HiPIMS

Hnilica, Jaroslav; Britun, Nikolay; Klein, Peter; Snyders, Rony; Vasina, P.

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Sputtered titanium species dynamics in HiPIMS

Hnilica, Jaroslav; Britun, Nikolay; Klein, Peter et al.

2020 • Workshop on Plasma-Based Synthesis of Nanomaterials

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https://hdl.handle.net/20.500.12907/20340

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Research center :

CIRMAP - Centre d'Innovation et de Recherche en Matériaux Polymères

Disciplines :

Chemistry

Author, co-author :

Hnilica, Jaroslav

Britun, Nikolay

Klein, Peter

Snyders, Rony ; Université de Mons > Faculté des Sciences > Service de Chimie des Interactions Plasma-Surface

Vasina, P.

Language :

English

Title :

Sputtered titanium species dynamics in HiPIMS

Publication date :

12 February 2020

Number of pages :

Event name :

Workshop on Plasma-Based Synthesis of Nanomaterials

Event place :

Prague, Czechia

Event date :

2020

Research unit :

S882 - Chimie des Interactions Plasma-Surface

Research institute :

R400 - Institut de Recherche en Science et Ingénierie des Matériaux

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since 18 January 2021

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