González-Velasco J R, Gutiérrez-Ortiz M A, Marca J-L, González-Marcos M P and Blanchard G 2001 Appl. Catal. B 33 303
Masui T, Ozaki T, Machida K and Adachi G 2000 J. Alloys Compounds 303-304 49
Angove D E and Cant N W 2000 Catal. Today 63 371
Mamontov E, Dmowski W, Egami T and Kao C-C 2000 J. Phys. Chem. Solids 61 431 (Pubitemid 30556083)
Nikolova D, Stoyanova E, Stoychev D, Stefanov P and Marinova T 2006 Surf. Coat. Technol. 201 1559 (Pubitemid 44362115)
Kang Y M, Kwon S H, Choi J H, Cho Y J and Song P K 2010 Thin Solid Films 518 3081
Wittig J 1968 Phys. Rev. Lett. 21 1250
Aiempanakit M, Kubart T, Larsson P, Sarakinos K, Jensen J and Helmersson U 2011 Thin Solid Films 519 7779
Mitchell A C G and Zemansky M W 1977 Resonance Radiation and Excited Atoms (Cambridge: Cambridge University Press) pp 97-122
Hilborn R C 1982 Am. J. Phys. 50 982
Britun N, Gaillard M, Schwaederlé L, Kim Y M and Han J G 2006 Plasma Sources Sci. Technol. 15 790 (Pubitemid 44679425)
Gaillard M, Britun N, Kim Y M and Han J G 2007 J. Phys. D: Appl. Phys. 40 809 (Pubitemid 46485783)
Ricard A, Nouvellon C, Konstantinidis S, Dauchot J P, Wautelet M and Hecq M 2002 J. Vac. Sci. Technol. A 20 1488 (Pubitemid 34882470)
Britun N, Gaillard M, Oh S G and Han J G 2007 J. Phys. D: Appl. Phys. 40 5098 (Pubitemid 47411307)
Britun N, Gaillard M and Han J G 2008 J. Phys. D: Appl. Phys. 41 185201
Ono T, Kenmotsu T and Muramoto T 2008 Simulation of the sputtering process Reactive Sputter Deposition (Springer Series in Materials Science) ed D Depla and S Mahieu (Berlin: Springer) p 22
Payling R and Larkins P 2002 Optical Emission Lines of the Elements (New York: Wiley-InterScience)
Konstantinidis S, Ricard A, Snyders R, Vandeparre H, Dauchot J P and Hecq M 2005 Surf. Coat. Technol. 200 841 (Pubitemid 41269025)
Severin D, Kappertz O, Nyberg T, Berg S, Pflug A and Wuttig M 2009 J. Appl. Phys. 105 093302
Britun N, Gaillard M, Kim Y-M, Kim K-S and Han J-G 2007 Met. Mater. Int. 13 483
Konstantinidis S, Ricard A, Ganciu M, Dauchot J P, Ranea C and Hecq M 2004 J. Appl. Phys. 95 2900
Berg S and Nyberg T 2005 Thin Solid Films 476 215 (Pubitemid 40259151)
Fridman A and Kennedy L 2004 Plasma Physics and Engineering (New York: Taylor and Francis Routledge) p 136
Linss V, Kupfer H, Peter S and Richter F 2004 J. Phys. D: Appl. Phys. 37 1935
Dony M F, Ricard A, Dauchot J P, Hecq M and Wautelet M 1995 Surf. Coat. Technol. 74-75 479
Domínguez-Crespo M A, Rodil S E, Torres-Huerta A M, Ramírez-Meneses E and Suárez-Velázquez G 2009 Surf. Coat. Technol. 204 571
Yamamura Y and Tawara H 1996 At. Data Nucl. Data tables 62 181 (Pubitemid 126171389)
National Institute of Standards and Technology's (NIST) Physical Reference Data. Atomic Spectra Database webpage: www.nist.gov/pml/data/asd.cfm
Murphy A B 1997 Phys. Rev. E 55 7473
Harris S G, Doyle E D, Wong Y-C, Munroe P R, Cairney J M and Long J M 2004 Surf. Coat. Technol. 183 283 (Pubitemid 38653033)