Mozgrin D V, Fetisov I K and Khodachenko G V 1995 Plasma Phys. Rep. 21 400
Kouznetsov V, Macák K, Schneider J M, Helmersson U and Petrov I 1999 Surf. Coat. Technol. 122 290
Bohlmark J, Lattemann M, Gudmundsson J T, Ehiasarian A P, Aranda-Gonzalvo Y, Brenning N and Helmersson U 2006 Thin Solid Films 515 1522 (Pubitemid 44716061)
Horwat D and Anders A 2010 J. Appl. Phys. 108 123306
Bohlmark J, Gudmundsson J T, Alami J, Latteman M and Helmersson U 2005 IEEE Trans. Plasma Sci. 33 346 (Pubitemid 40679407)
Konstantinidis S, Ganciu M, Ricard A, Dauchot J P and Hecq M 2006 J. Appl. Phys. 99 13307 (Pubitemid 43107147)
Petrov I, Barna P B, Hultman L and Greene J E 2003 J. Vac. Sci. Technol. A 21 S117
Samuelsson M, Lundin D, Sarakinos K, Bjorefors F, Walivaara B, Ljungcantz H and Helmersson U 2012 J. Vac. Sci. Technol. A 30 031507
Pajdarova A D, Vlcek J, Kudlacek P and Lukas J 2009 Plasma Sources Sci. Technol. 18 022008
Poolcharuansin P and Bradley J W 2010 Plasma Sources Sci. Technol. 19 025010
Poolcharuansin P, Liebig B and Bradley J W 2010 IEEE Trans. Plasma Sci. 38 3007
Hala M, Viau N, Zabeida O, Klemberg-Sapieha J E and Martinu L 2010 J. Appl. Phys. 107 043305
Martin N, Santo A M E, Sanjinés R and Lévy F 2001 Surf. Coat. Technol. 138 77 (Pubitemid 32232675)
Kadlec S, Quaeyhaegens C, Knuyt G and Stals L M 1997 Surf. Coat. Technol. 97 633
Bradley J W, Bäcker H, Aranda-Gonzalvo Y, Kelly P J and Arnell R D 2002 Plasma Sources Sci. Technol. 11 165 (Pubitemid 34697197)
Kim Y M, Chung Y M, Jung M J, Vlcek J, Musil J and Han J G 2005 Surf. Coat. Technol. 200 835 (Pubitemid 41282323)
Hecimovic A, Burcalova K and Ehiasarian A P 2008 J. Phys. D: Appl. Phys. 41 095203
Misina M, Bradley J W, Backer H, Aranda-Gonzalvo Y, Karkari S K and Forder D 2002 Vacuum 68 171 (Pubitemid 35167593)
Vlcek J, Kudlacek P, Burcalova K and Musil J 2007 Europhys. Lett. 77 45002
Greczynski G and Hultman L 2010 Vacuum 84 1159
Thompson M W 1968 Phil. Mag. 18 377
Kadlec S, Quaeyhaegens C, Knuyt G and Stals L M 1997 Surf. Coat. Technol. 89 177
Hecimovic A and Ehiasarian A P 2009 J. Phys. D: Appl. Phys. 42 135209
Hecimovic A and Ehiasarian A P 2010 J. Appl. Phys. 108 063301
Poolcharuansin P and Bradley J W 2011 Surf. Coat. Technol. 205 S307
Christie D J 2005 J. Vac. Sci. Technol. A 23 330 (Pubitemid 43126395)
Gudmundsson J T, Brenning N, Lundin D and Helmersson U 2012 J. Vac. Sci. Technol. A 30 030801
Ganciu M, Hecq M, Konstantinidis S, Dauchot J P, Touzeau M, de Poucques L and Bretagne J 2004 World Patent
Matsui H, Toyoda H and Sugai H 2005 J. Vac. Sci. Technol. A 23 671 (Pubitemid 43123912)
Grill A 1993 Cold Plasma in Materials Fabrication (New York: IEEE Press) p 18
Lundin D, Larsson P, Wallin E, Lattemann M, Brenning N and Helmersson U 2008 Plasma Sources Sci. Technol. 17 035021
Gylfason K B, Alami J, Helmersson U and Gudmundsson J T 2005 J. Phys. D: Appl. Phys. 38 3417 (Pubitemid 41277557)
Britun N, Han J G and Oh S-G 2008 Appl. Phys. Lett. 92 141503 (Pubitemid 351535583)
Britun N, Han J G and Oh S-G 2008 Plasma Sources Sci. Technol. 17 045013
Dullni E 1984 Nucl. Instrum. Methods Phys. Res. B 2 610
Husinsky W, Betz G and Girgis I 1984 J. Vac. Sci. Technol. A 2 698
Goehlich A, Niemoeller N and Doebele H F 2000 Phys. Rev. B 62 9349 (Pubitemid 32366520)
Gudmundsson J T, Sigurjonsson P, Larsson P, Lundin D and Helmersson U 2009 J. Appl. Phys. 105 123302
Vetushka A and Ehiasarian A P 2008 J. Phys. D: Appl. Phys. 41 015204
Fantz U 2006 Plasma Sources Sci. Technol. 15 S137
Zhu X-M and Pu Y-K 2010 J. Phys. D: Appl. Phys. 43 403001
Ehiasarian A P, Vetushka A, Hecimovic A and Konstantinidis S 2008 J. Appl. Phys. 104 083305
Britun N, Palmucci M, Konstantinidis S and Snyders R Time-resolved evolution of the sputtered species ground state densities in a HiPIMS discharge Proc. 11th Int. Symp. for Sputtering (ISSP-2011 (Kyoto, Japan, 6-8 July 2011) p 198
de Poucques L, Imbert J-C, Boisse-Laporte C, Bretagne J, Ganciu M, Teulé-Gay L and Touzeau M 2006 Plasma Sources Sci. Technol. 15 661 (Pubitemid 44679411)
Vasina P, Mesko M, Ganciu M, Bretagne J, Boisse-Laporte C, De Poucques L and Touzeau M 2005 Europhys. Lett. 72 390 (Pubitemid 41595896)
Vasina P, Mesko M, Imbert J C, Ganciu M, Boisse-Laporte C, De Poucques L, Touzeau M, Pagnon D and Bretagne J 2007 Plasma Sources Sci. Technol. 16 501 (Pubitemid 47241015)
Fridman A and Kennedy L 2011 Plasma Physics and Engineering 2nd edn (New York: Taylor and Francis) p 134
Bray C A and Jonkman R M 1970 J. Chem. Phys. 52 477
Lundin D, Brenning N, Jädernäs D, Larsson P, Wallin E, Lattemann M, Raadu M A and Helmersson U 2009 Plasma Sources Sci. Technol. 18 045008
Bunshah R F 1994 Handbook of Deposition Technologies for Films and Coatings-Science, Technology and Applications 2nd edn (Park Ridge, NJ: Noyes Publications) p 273
Sarakinos K, Alami J and Konstantinidis S 2010 Surf. Coat. Technol. 204 1661
Brenning N, Huo C, Lundin D, Raadu M A, Vitelaru C, Stancu G D, Minea T and Helmersson U 2012 Plasma Sources Sci. Technol. 21 025005
The Stopping and Range of Ions in Matter software www.srim.org - ref-separator -
Nouvellon C, Michiels M, Dauchot J P, Archambeau C, Laffineur F, Silberberg E, Delvaux S, Cloots R, Konstantinidis S and Snyders R 2012 Surf. Coat. Technol. 206 3542
Poolcharuansin P, Liebig B and Bradley J W 2012 Plasma Sources Sci. Technol. 21 015001