Fractal dimension, growth mode and residual stress of metal thin films

Guisbiers, Gregory; Van Overschelde, Olivier; Wautelet, Michel; Leclère, Philippe; Lazzaroni, Roberto

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Fractal dimension, growth mode and residual stress of metal thin films

Guisbiers, Gregory; Van Overschelde, Olivier; Wautelet, Michel et al.

2007 • In Journal of Physics: D Applied Physics, 40

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Disciplines :

Physics

Author, co-author :

Guisbiers, Gregory

Van Overschelde, Olivier ; Université de Mons > Faculté des Sciences > Chimie des Interactions Plasma-Surface

Wautelet, Michel ; Université de Mons > Faculté des Sciences > FS - Service du Doyen

Leclère, Philippe ; Université de Mons > Faculté des Sciences > Chimie des matériaux nouveaux

Lazzaroni, Roberto ; Université de Mons > Faculté des Sciences > Service de Chimie des matériaux nouveaux

Language :

English

Title :

Fractal dimension, growth mode and residual stress of metal thin films

Publication date :

02 February 2007

Journal title :

Journal of Physics: D Applied Physics

ISSN :

0022-3727

eISSN :

1361-6463

Publisher :

Institute of Physics Publishing, Bristol, United Kingdom

Volume :

Peer reviewed :

Peer Reviewed verified by ORBi

Available on ORBi UMONS :

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Bibliography

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Ohring M 2002 Materials Science of Thin Films Deposition and Structure 2nd edn (New York: Academic)
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