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Deposition of Metal Oxide layers by High-Power Impulse Magnetron Sputtering
Konstantinidis, Stéphanos; Hemberg, A.; Tromont, A. et al.
2007
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Disciplines :
Chemistry
Physics
Author, co-author :
Konstantinidis, Stéphanos  
Hemberg, A.
Tromont, A.
Dauchot, J-P.
Hecq, Michel ;  Université de Mons > Faculté des Sciences > Chimie des Interactions Plasma-Surface
Language :
English
Title :
Deposition of Metal Oxide layers by High-Power Impulse Magnetron Sputtering
Publication date :
01 January 2007
Event name :
50th Annual Technical Conference of the Society of Vacuum Coaters
Event place :
Louisville, United States
Research unit :
S882 - Chimie des Interactions Plasma-Surface
Research institute :
R400 - Institut de Recherche en Science et Ingénierie des Matériaux
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